MEMS-based energy harvesting devices for low-power applications – a review

Recently, there have been notable advancements in energy harvesting from various sources, including mechanical vibrations, thermal gradients, and electromagnetic and solar radiations, intending to achieve sustainable micro/nanosystems. Micro-electromechanical systems (MEMS) and microfluidics have facilitated the development of smaller energy harvesters that offer a stable and portable power supply. MEMS-based piezoelectric power generators can harvest power from low-level ambient vibration sources. Still, their usage is limited by their low power output in the microwatt range and restricted operation frequency. There is an increasing interest in vivo therapies in harnessing energy from sources like ambient or human bodies. While MEMS-based energy harvesters hold the potential for powering implantable biomedical devices (IMD), their performance is hindered by various factors. However, experimental results show…