Controlled Vapor Growth and Nonlinear Optical Applications of Large‐Area 3R Phase WS₂ and WSe₂ Atomic Layers

Abstract 2D layered 3‐rhombohedral (3R) phase transition metal dichalcogenides (TMDs) have received significantly increased research interest in nonlinear optical applications due to their unique crystal structures and broken inversion symmetry. However, controlled growth of 2D 3R phase TMDs still remains a great challenge. In this work, a direct growth of large‐area WS 2 and WSe 2 atomic layers with controllable crystal phases via a developed temperature selective physical vapor deposition route is reported. Large‐area triangular 3R phase layers are synthesized at a lower deposition temperature. Steady state and time‐resolved photoluminescence spectroscopy and Raman spectroscopy are used to study the unique properties of 3R phase layers due to different layer stacking and interlayer coupling. More importantly, with broken inversion symmetry, 3R…